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| 项目 | 单位 | 高级电子级 | 试剂级 | |
| UP级规格 | EL级规格 | AR级规格 | ||
| 含量 | % | 49.0～50.0 | 49.0~50.0 | ≥40.0 |
| 外观 | - | 澄清无色 | 澄清无色 | - |
| 灼烧残渣(以硫酸盐计) | ppm | - | ≤5 | ≤20 |
| 颗粒(≥0.5um) | 个/ml | ≤25 | - | - |
| 颗粒(≥0.3um) | 个/ml | ≤150 | - | - |
| 颗粒(≥0.2um) | 个/ml | ≤300 | - | - |
| 颗粒(≥1.0um) | 个/ml | - | ≤25 | - |
| 氟硅酸H2SiF6 | ppm | ≤100 | ≤200 | ≤400 |
| 氯化物(Cl) | ppm | ≤5000 | ≤5000 | ≤10 |
| 硝酸盐(NO3 ) | ppm | ≤3000 | ≤3000 | - |
| 磷酸盐(PO4 ) | ppm | ≤1000 | ≤1000 | ≤2 |
| 硫酸盐和亚硫酸盐(SO4) | ppm | ≤5000 | ≤5000 | ≤20 |
| 铝(Al) | ppb | ≤10 | ≤50 | - |
| 锑(Sb) | ppb | ≤15 | ≤30 | - |
| 砷(As) | ppb | ≤15 | ≤30 | - |
| 钡(Ba) | ppb | ≤10 | - | - |
| 铍(Be) | ppb | ≤5 | - | - |
| 铋(Bi) | ppb | ≤5 | - | - |
| 硼(B) | ppb | ≤10 | ≤50 | - |
| 镉(Cd) | ppb | ≤10 | - | - |
| 钙(Ca) | ppb | ≤10 | ≤300 | - |
| 铬(Cr) | ppb | ≤10 | ≤10 | - |
| 钴(Co) | ppb | - | - | - |
| 铜(Cu) | ppb | ≤10 | ≤50 | - |
| 镓(Ga) | ppb | ≤10 | - | - |
| 锗(Ge) | ppb | ≤10 | - | - |
| 金(Au) | ppb | ≤10 | - | - |
| 铁(Fe) | ppb | ≤10 | ≤200 | ≤1000 |
| 铅(Pb) | ppb | ≤10 | ≤100 | ≤5000 |
| 锂(Li) | ppb | ≤5 | - | - |
| 镁(Mg) | ppb | ≤10 | ≤200 | - |
| 锰(Mn) | ppb | ≤10 | ≤200 | - |
| 钼(Mo) | ppb | ≤10 | - | - |
| 镍(Ni) | ppb | ≤10 | ≤100 | - |
| 铌(Nb) | ppb | - | - | - |
| 钾(K) | ppb | ≤10 | ≤300 | - |
| 银(Ag) | ppb | ≤5 | - | - |
| 钠(Na) | ppb | ≤10 | ≤300 | - |
| 锶(Sr) | ppb | ≤10 | - | - |
| 钽(Ta) | ppb | ≤10 | - | - |
| 铊(Tl) | ppb | ≤10 | - | - |
| 钛(Ti) | ppb | ≤10 | ≤300 | - |
| 锡(Sn) | ppb | ≤10 | ≤300 | - |
| 钒(V) | ppb | ≤10 | ---- | - |
| 锌(Zn) | ppb | ≤10 | ≤300 | - |
