氢氟酸
-
| 项目 |
单位 |
高级电子级 |
试剂级 |
| UP级规格 |
EL级规格 |
AR级规格 |
| 含量 |
% |
49.0～50.0 |
49.0~50.0 |
≥40.0 |
| 外观 |
- |
澄清无色 |
澄清无色 |
- |
| 灼烧残渣(以硫酸盐计) |
ppm |
- |
≤5 |
≤20 |
| 颗粒(≥0.5um) |
个/ml |
≤25 |
- |
- |
| 颗粒(≥0.3um) |
个/ml |
≤150 |
- |
- |
| 颗粒(≥0.2um) |
个/ml |
≤300 |
- |
- |
| 颗粒(≥1.0um) |
个/ml |
- |
≤25 |
- |
| 氟硅酸H2SiF6 |
ppm |
≤100 |
≤200 |
≤400 |
| 氯化物(Cl) |
ppm |
≤5000 |
≤5000 |
≤10 |
| 硝酸盐(NO3 ) |
ppm |
≤3000 |
≤3000 |
- |
| 磷酸盐(PO4 ) |
ppm |
≤1000 |
≤1000 |
≤2 |
| 硫酸盐和亚硫酸盐(SO4) |
ppm |
≤5000 |
≤5000 |
≤20 |
| 铝(Al) |
ppb |
≤10 |
≤50 |
- |
| 锑(Sb) |
ppb |
≤15 |
≤30 |
- |
| 砷(As) |
ppb |
≤15 |
≤30 |
- |
| 钡(Ba) |
ppb |
≤10 |
- |
- |
| 铍(Be) |
ppb |
≤5 |
- |
- |
| 铋(Bi) |
ppb |
≤5 |
- |
- |
| 硼(B) |
ppb |
≤10 |
≤50 |
- |
| 镉(Cd) |
ppb |
≤10 |
- |
- |
| 钙(Ca) |
ppb |
≤10 |
≤300 |
- |
| 铬(Cr) |
ppb |
≤10 |
≤10 |
- |
| 钴(Co) |
ppb |
- |
- |
- |
| 铜(Cu) |
ppb |
≤10 |
≤50 |
- |
| 镓(Ga) |
ppb |
≤10 |
- |
- |
| 锗(Ge) |
ppb |
≤10 |
- |
- |
| 金(Au) |
ppb |
≤10 |
- |
- |
| 铁(Fe) |
ppb |
≤10 |
≤200 |
≤1000 |
| 铅(Pb) |
ppb |
≤10 |
≤100 |
≤5000 |
| 锂(Li) |
ppb |
≤5 |
- |
- |
| 镁(Mg) |
ppb |
≤10 |
≤200 |
- |
| 锰(Mn) |
ppb |
≤10 |
≤200 |
- |
| 钼(Mo) |
ppb |
≤10 |
- |
- |
| 镍(Ni) |
ppb |
≤10 |
≤100 |
- |
| 铌(Nb) |
ppb |
- |
- |
- |
| 钾(K) |
ppb |
≤10 |
≤300 |
- |
| 银(Ag) |
ppb |
≤5 |
- |
- |
| 钠(Na) |
ppb |
≤10 |
≤300 |
- |
| 锶(Sr) |
ppb |
≤10 |
- |
- |
| 钽(Ta) |
ppb |
≤10 |
- |
- |
| 铊(Tl) |
ppb |
≤10 |
- |
- |
| 钛(Ti) |
ppb |
≤10 |
≤300 |
- |
| 锡(Sn) |
ppb |
≤10 |
≤300 |
- |
| 钒(V) |
ppb |
≤10 |
---- |
- |
| 锌(Zn) |
ppb |
≤10 |
≤300 |
- |
